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Review on the progress of ultra-precision machining technologies

Julong YUAN, Binghai LYU, Wei HANG, Qianfa DENG

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 2,   Pages 158-180 doi: 10.1007/s11465-017-0455-9

Abstract:

Ultra-precision machining technologies are the essential methods, to obtain the highest form accuracyThe conception, applications and history of ultra-precision machining are introduced in this article,and the developments of ultra-precision machining technologies, especially ultra-precision grinding,ultra-precision cutting and polishing are also reviewed.

Keywords： ultra-precision grinding     ultra-precision cutting     ultra-precision polishing     research status in China     development    

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Research progress on ultra-precision machining technologies for soft-brittle crystal materials

Hang GAO,Xu WANG,Dongming GUO,Yuchuan CHEN

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 1,   Pages 77-88 doi: 10.1007/s11465-017-0411-8

Abstract:

Soft-brittle crystal materials are widely used in many fields, especially optics and microelectronics. However, these materials are difficult to machine through traditional machining methods because of their brittle, soft, and anisotropic nature. In this article, the characteristics and machining difficulties of soft-brittle and crystals are presented. Moreover, the latest research progress of novel machining technologies and their applications for soft-brittle crystals are introduced by using some representative materials (e.g., potassium dihydrogen phosphate (KDP), cadmium zinc telluride (CZT)) as examples. This article reviews the research progress of soft-brittle crystals processing.

Keywords： brittle     soft     functional crystal     ultra-precision machining    

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Ultra-precision ductile grinding of BK7 using super abrasive diamond wheel

ZHAO Qingliang, Brinksmeier Ekkard, Riemer Oltmann, Rickens Kai

Frontiers of Mechanical Engineering 2007, Volume 2, Issue 3,   Pages 350-355 doi: 10.1007/s11465-007-0061-3

Abstract: In this paper, a novel conditioning technique using copper bonded diamond grinding wheels of 91 yD graindeveloped to precisely and effectively condition a nickel-electroplated monolayer coarse-grained diamond grindingFinally, the grinding experiment on BK7 was conducted using the well-conditioned wheel with the correspondingresult shows that the newly developed conditioning technique is applicable and feasible to ductile grinding

Keywords： ELID     peripheral     electrolytic in-process     nickel-electroplated monolayer     measurement    

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Special issue: Ultra-precision machining

Zhuangde JIANG,Dongming GUO

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 1,   Pages 1-2 doi: 10.1007/s11465-017-0445-y

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Model reduction techniques for dynamics analysis of ultra-precision linear stage

Xuedong CHEN, Zhixin LI

Frontiers of Mechanical Engineering 2009, Volume 4, Issue 1,   Pages 64-70 doi: 10.1007/s11465-009-0009-x

Abstract: elements are used to simplify the internal interaction in the proposed finite element (FE) model of an ultra-precision

Keywords： dynamics analysis     air-bearing     linear stage     reduction    

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Advances in molecular dynamics simulation of ultra-precision machining of hard and brittle materials

Xiaoguang GUO,Qiang LI,Tao LIU,Renke KANG,Zhuji JIN,Dongming GUO

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 1,   Pages 89-98 doi: 10.1007/s11465-017-0412-7

Abstract: Ultra-precision machining is widely used in processing hard and brittle materials to obtain nanoscaleThis paper provides a review of present research on the molecular dynamics simulation of ultra-precision

Keywords： MD simulation     ultra-precision machining     hard and brittle materials     machining mechanism     review    

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Air-bearing position optimization based on dynamic characteristics of ultra-precision linear stages

CHEN Xuedong, LI Zhixin

Frontiers of Mechanical Engineering 2008, Volume 3, Issue 4,   Pages 400-407 doi: 10.1007/s11465-008-0060-z

Abstract: Air-bearings are installed between the stator and the mover of ultra-precision linear stages to suppress

Keywords： manufacture     different     interaction     air-bearings     response amplitude    

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Electrorheological damper for the ultra-precision air bearing stage

ZHU Yu, JIA Songtao, CHEN Yaying, LI Guang

Frontiers of Mechanical Engineering 2008, Volume 3, Issue 2,   Pages 158-163 doi: 10.1007/s11465-008-0031-4

Abstract: This paper illustrates how the electrorheological damper substantially improves the performance of the ultra-precisionMeanwhile, the ultra-precision air bearing stage driven by the linear-motor is characterized by zeroThe results prove that by using the advanced sliding mode control method, the characteristics of the ultra-precision

Keywords： post-yield     linear-motor     advanced sliding     pre-yield     position    

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Ultra-Precision Machining Technology and Equipment for High-End Optical Elements

Jiang Zhuangde, Li Changsheng , Sun Lin, Duan Duanzhi, Kang Chengwei ,Chen Shanshan, Lin Qijing, Yang Shuming

Strategic Study of CAE 2023, Volume 25, Issue 1,   Pages 131-141 doi: 10.15302/J-SSCAE-2023.07.003

Abstract: Researching the ultra-precision machining technology and equipment for high-end optical elementsIn this study, the ultra-precision machining methods and equipment for optical elements, high-performancebasic components, and measurement methods and equipment used in ultra-precision optical machining Five development trends are summarized including extremalization of precision and size, integration ofThrough extensive survey and discussions, a technology roadmap for ultra-precision manufacturing of high-end

Keywords： optical element     precision manufacturing     ultra-precision machine tool     ultra-precision machining     optical    

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Development and application prospects of piezoelectric precision driving technology

ZHAO Chunsheng, ZHANG Jiantao, ZHANG Jianhui, JIN Jiamei

Frontiers of Mechanical Engineering 2008, Volume 3, Issue 2,   Pages 119-132 doi: 10.1007/s11465-008-0034-1

Abstract: of science and technology, microelectronics manufacturing, photonics technology, space technology, ultra-precisionmachining, micro-robotics, biomedical engineering and other fields urgently need the support of modern precisionModern precision driving technology can be generally divided into two parts: electromagnetic and non-electromagneticThis paper presents the development of piezoelectric precision driving technology at home and abroadparts manipulation and assembly technology; 4) biomedical engineering; 5) aerospace technology; and 6) ultra-precision

Keywords： Electromagnetic     ultra-precision processing     technology     piezoelectric     cumbrous    

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Full-band error control and crack-free surface fabrication techniques for ultra-precision fly cutting

F. H. ZHANG, S. F. WANG, C. H. AN, J. WANG, Q. XU

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 2,   Pages 193-202 doi: 10.1007/s11465-017-0448-8

Abstract: The most common method of manufacturing half-meter KDP crystals is ultra-precision fly cutting.When processing KDP crystals by ultra-precision fly cutting, the dynamic characteristics of the fly cuttingthis study, the anisotropic machinability of KDP crystals and the causes of typical surface errors in ultra-precision

Keywords： ultra-precision fly cutting     large-aperture KDP crystals     spatial frequency     processing error    

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Determination of the scheme of precision grinding compensation on the radome

GUO Dongming, LIU Minjing, ZHANG Chunbo, SHENG Xianjun, SUN Yuwen

Frontiers of Mechanical Engineering 2007, Volume 2, Issue 3,   Pages 263-266 doi: 10.1007/s11465-007-0045-3

Abstract: Determining the grinding scheme from the boresight error performance is the most important problem toA typical inverse problem about electromagnetic fields is solving the precise grinding compensation areamathematical calculations with experimental measurement is presented in this paper to determine the grindingcalculated and measured data of the boresight error and the boresight error slope before and after grinding

Keywords： mathematical     effective approach     experimental measurement     antenna     electromagnetic    

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Theoretical and experimental analysis on super precision grinding of monocrystal silicon

GUO Xiaoguang, GUO Dongming, KANG Renke, JIN Zhuji

Frontiers of Mechanical Engineering 2007, Volume 2, Issue 2,   Pages 137-143 doi: 10.1007/s11465-007-0023-9

Abstract: Through investigating the diamond-silicon grinding system, the grinding mechanism, including chip removaland subsurface damage, is discussed with the aid of the molecular dynamics (MD) approach and grindingBased on MD simulation, nanometric-grinding mechanism is analyzed from the viewpoint of instantaneousdistribution of atoms, grinding force, and the potential energy between atoms and the profile of theIn addition, the grinding experiment and profile detection with the aid of the measurment for 3D profiling

Keywords： machining mechanism     recovery     advancement     mechanism     subsurface    

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Subsurface damage pattern and formation mechanism of monocrystalline -GaO in grinding process

Frontiers of Mechanical Engineering 2022, Volume 17, Issue 2, doi: 10.1007/s11465-022-0677-3

Abstract: damage pattern and formation mechanism of monocrystalline β-Ga2O3 in different grindingin the ultrafine grinding process.Subsurface damage models for grinding process were established on the basis of the grinding principleThe formation of nanocrystals and amorphous phase was related to the grinding conditions and materialIt is important to investigate the ultraprecision grinding process of monocrystalline β-Ga2

Keywords： monocrystalline beta-phase gallium oxide     grinding process     subsurface damage     nanocrystals     amorphous    

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Title Author Date Type Operation

Review on the progress of ultra-precision machining technologies

Julong YUAN, Binghai LYU, Wei HANG, Qianfa DENG

Journal Article

Research progress on ultra-precision machining technologies for soft-brittle crystal materials

Hang GAO,Xu WANG,Dongming GUO,Yuchuan CHEN

Journal Article

Ultra-precision ductile grinding of BK7 using super abrasive diamond wheel

ZHAO Qingliang, Brinksmeier Ekkard, Riemer Oltmann, Rickens Kai

Journal Article

Special issue: Ultra-precision machining

Zhuangde JIANG,Dongming GUO

Journal Article

Model reduction techniques for dynamics analysis of ultra-precision linear stage

Xuedong CHEN, Zhixin LI

Journal Article

Advances in molecular dynamics simulation of ultra-precision machining of hard and brittle materials

Xiaoguang GUO,Qiang LI,Tao LIU,Renke KANG,Zhuji JIN,Dongming GUO

Journal Article

Air-bearing position optimization based on dynamic characteristics of ultra-precision linear stages

CHEN Xuedong, LI Zhixin

Journal Article

Electrorheological damper for the ultra-precision air bearing stage

ZHU Yu, JIA Songtao, CHEN Yaying, LI Guang

Journal Article

Ultra-Precision Machining Technology and Equipment for High-End Optical Elements

Jiang Zhuangde, Li Changsheng , Sun Lin, Duan Duanzhi, Kang Chengwei ,Chen Shanshan, Lin Qijing, Yang Shuming

Journal Article

Development and application prospects of piezoelectric precision driving technology

ZHAO Chunsheng, ZHANG Jiantao, ZHANG Jianhui, JIN Jiamei

Journal Article

Full-band error control and crack-free surface fabrication techniques for ultra-precision fly cutting

F. H. ZHANG, S. F. WANG, C. H. AN, J. WANG, Q. XU

Journal Article

Jianguo He: Ultra-precision Cutting Technology and Equipment toward Extreme Manufacturing（2019.10.10）

23 Apr 2021

Conference Videos

Determination of the scheme of precision grinding compensation on the radome

GUO Dongming, LIU Minjing, ZHANG Chunbo, SHENG Xianjun, SUN Yuwen

Journal Article

Theoretical and experimental analysis on super precision grinding of monocrystal silicon

GUO Xiaoguang, GUO Dongming, KANG Renke, JIN Zhuji

Journal Article

Subsurface damage pattern and formation mechanism of monocrystalline -GaO in grinding process

Journal Article